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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment Ingestion-build-266356 driven by the widespread and
Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment Ingestion-build-266356 driven by the widespread and
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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment Ingestion-build-266356 driven by the widespread and1 Scope This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma resistant components in dry etching chambers used in semiconductor manufacturing.
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