E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded SEMI D31-0825 (technical revision)

SEMI D31-0825 (technical revision)

devices that may classify a process endpoint by determining the size and count of particles in the process environment

2013년 4월 이후 www

SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)

E05418 - SEMI E54.18 - Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device Revision:SEMI E54.18-0914 - Superseded SEMI D31-0825 (technical revision)NOTICE: This Standard is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. 1 Purpose 1. 1 This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects which are common to all vacuum pump devices (VPD) on a