HB01200 - SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) Revision:SEMI HB12-1219 - Current This Specification is intended to

This Specification is intended to ensure a high-degree of device interoperability on the sensor/actuator network

SEMI E17-91 (first published)

The components (i

·        プロセスカセットまたはクォーツボートとプロセスチェンバーの底面との間

HB01200 - SEMI HB12 - Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) Revision:SEMI HB12-1219 - Current This Specification is intended toAs the high brightness light emitting diode (HB LED) and patterned sapphire substrate (PSS) industry is under rapid development, it is very necessary to establish the standard for PSS products, which can provide a clear and common basis to meet the demands of research and development, production and sale for light emitting diode (LED) industry. Because the PSS industry belongs to the upstream in the whole LED industry, a sound standard and