MECS UTV-2500H-SYSTEM Wafer Transport Robot System Controller CS-7000 Used Nikon Precision 4K577-177 Integrator Sensor

Nikon Precision 4K577-177 Integrator Sensor NSR-S202A Step-and-Repeat Working

Inventory # CONF-2135

Schematics and Retrofit Instructions

Sub Assembly: Main Body

MECS UTV-2500H-SYSTEM Wafer Transport Robot System Controller CS-7000 Used Nikon Precision 4K577-177 Integrator SensorMECS UTV 2500H SYSTEM Wafer Transport Robot System Controller CS 7000 Used Inventory # 8069 This MECS UTV 2500H SYSTEM is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: UTV 2500H SYSTEM Model No: CS 7000 Input: 1, 100VAC, 50 60Hz, 5A CE Marked Made in Japan Installed Components Panasonic Servo Drive, Theta Axis Part No: MSD5A1A1XX Panasonic Servo Drive, X Axis Part No: